Thermal
Oxidation of Silicon (25.4-150mm Wafers)
Virginia Semiconductor, Inc. offers wet thermal oxidation of silicon
substrates. These layers are intended as etch masking layers, sacrificial
layers, and basic electrical insulation layers. Wafers ranging in
diameter from 25 mm to 100 mm are oxidized at Virginia Semi. Typical furnace
temperatures are about 1100C. Silicon wafers ranging in thickness from
50um to 25mm have been successfully oxidized. Oxide thickness range
is 250Å to about 5um. The dry oxidation technique can be used for oxide
layer thickness less than about 3000Å but Virginia Semi offers the wet process as the
default. Contact Virginia Semi directly for discussion and quotation of oxide
layers greater than 4um. Wafers with diameter greater than 100mm are
thermally oxidized by a quality, sub-contractor.
All pricing and services assume Virginia Semi supplied substrates, and
the price for the substrate is not included below. Pricing may vary
depending on the exact wafer and oxide specification, as well as, variations in
pricing with subcontractors on 150mm material.
Each batch price is for wafers of the same specification with the
same oxidation layer. Multiple specifications or oxidation layers are charged
as separate batches.
General pricing for thermal oxidation of wafers (silicon
wafer price not included), diameters 25mm through 100mm follows:
Oxide Thickness Range
|
Batch Size
|
Wafer Uniformity
|
Batch Uniformity
|
Price Per Batch for Oxidation
|
250Å-5000Å
|
1-25
|
Within 100Å
|
+/- 10%
|
|
250Å-5000Å
|
26-100
|
Within 100Å
|
+/- 10%
|
|
0.5um-0.9um
|
1-25
|
Within 100Å
|
+/- 10%
|
|
0.5um-0.9um
|
26-100
|
Within 100Å
|
+/- 10%
|
|
1.0um-1.8um
|
1-25
|
Within 100Å
|
+/- 10%
|
|
1.0um-1.8um
|
26-100
|
Within 100Å
|
+/- 10%
|
|
1.9um-4.0um
|
1-25
|
Within 100Å
|
+/- 10%
|
|
1.9um-4.0um
|
26-100 |
Within 100Å
|
+/- 10%
|
|
> 4.0 um
|
|
|
|
Contact Us
|
General pricing for thermal oxidation of wafers (silicon
wafer price not included), diameters 125-150mm follows:
Oxide Thickness Range
|
Batch Size
|
Wafer Uniformity
|
Batch Uniformity
|
Price Per Wafer for Oxidation
|
250Å-1.5um
|
25
|
Within 100Å
|
+/- 10%
|
|
250Å-1.5um
|
100 |
Within 100Å
|
+/- 10%
|
|
Please contact VSI today for further information and
assistance.
Thomas Digges, III, USA & International Sales, 540 373
2900 X17, digges@virginiasemi.com
Virginia Semi offers oxidation services on standard unprocessed
silicon wafers (preferably Virginia Semi substrates, see Virginia Semi on-line wafer inventory from
the home page), and does not offer thermal oxidation of processed and patterned
wafers.
|