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Welcome to the VSI Technology Library
 

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1. General Properties and Specifications
  • Your Guide to SEMI Specifications for Si Wafers
  • General Properties of Si, Ge, SiO2, and Si3N4
  • VSI Specifications for Silicon Wafers
  • Basic Wafer Definitions
  • Properties of Glass as Related to Applications with Silicon
  • VSI Specifications for SOI Wafers
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    2. Crystallographic Properties of Si
  • Basic Crystallographic Definitions & Properties of Si, SiGe, & Ge
  • <110> Fz Wafers by Coring : VSI Patent
  • Cutting Off-Axis Wafers
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    3. Optical Properties
  • Optical Properties of SiGe and Ge
  • Optical Properties of Silicon
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    5. Mechanical and Thermal Properties
  • Basic Mechanical and Thermal Properties
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    6. Transport properties in Si
  • Restitivity, Mobility, & Diffusitivity
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    7. Technology Notes
  • Journal on Crystal Growth of SiGe
  • Oxygen Precipitation in Silicon
  • Wet-Chemical Etching and Cleaning of Silicon
  • Technical Notes on UltraThin® Wafer Bonding - US Patent
  • Technical Note on ULTRATHIN® Silicon Wafers (<200um thick)